Problem pquest SNF 2007-09-14 12:22:24: Available for non-Cl2 processes only
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Fri Sep 14 12:22:24 PDT 2007
As chlorine is unavailable, the machine is now on the fluorine chemistry cycle. When Cl2 becomes available again, a chamber clean will be scheduled as appropriate. Apologies for the inconvenience.
More information about the pquest-pcs
mailing list