Problem pquest SNF 2007-09-14 12:22:24: Available for non-Cl2 processes only

mtang at mtang at
Fri Sep 14 12:22:24 PDT 2007

As chlorine is unavailable, the machine is now on the fluorine chemistry cycle.  When Cl2 becomes available again, a chamber clean will be scheduled as appropriate.  Apologies for the inconvenience.

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