Problem pquest SNF 2007-09-14 12:22:24: Available for non-Cl2 processes only

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Sep 14 12:22:24 PDT 2007


As chlorine is unavailable, the machine is now on the fluorine chemistry cycle.  When Cl2 becomes available again, a chamber clean will be scheduled as appropriate.  Apologies for the inconvenience.




More information about the pquest-pcs mailing list