From wwang at snf.stanford.edu Wed Apr 2 21:32:22 2008 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Wed, 2 Apr 2008 21:32:22 -0700 Subject: Problem pquest SNF 2008-04-02 21:32:21: ECR error Message-ID: I came in when everything seems to be normal with the instrument. I loaded a test wafer and wanted to run "oxygen3" program. When I clicked the "Start" button, a dialog box popped up reporting an ECR error, and asked me to save the file to some local directory. I couldn't get back the original run-time menu after this. So I cancelled my process and my test wafer is still inside chamber. From wwang at snf.stanford.edu Wed Apr 2 22:02:07 2008 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Wed, 2 Apr 2008 22:02:07 -0700 Subject: Shutdown pquest SNF 2008-04-02 22:02:06: same problem as reported Message-ID: From eenriquez at snf.stanford.edu Thu Apr 3 08:51:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Apr 2008 08:51:24 -0700 Subject: Problem pquest SNF 2008-04-02 21:32:21: ECR error Message-ID: Found the computer in the Windows Program manager screen. This is the second time that the computer had to be reset. Performed a SCANDISK and saved recovery files. Cycled a wafer using O2 Clean recipe with no problems. From eenriquez at snf.stanford.edu Thu Apr 3 08:51:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Apr 2008 08:51:30 -0700 Subject: Shutdown pquest SNF 2008-04-02 22:02:06: same problem as reported Message-ID: Found the computer in the Windows Program manager screen. This is the second time that the computer had to be reset. Performed a SCANDISK and saved recovery files. Cycled a wafer using O2 Clean recipe with no problems. From koseki at snf.stanford.edu Tue Apr 8 13:09:03 2008 From: koseki at snf.stanford.edu (koseki at snf.stanford.edu) Date: Tue, 8 Apr 2008 13:09:03 -0700 Subject: Problem pquest SNF 2008-04-08 13:09:03: low DC bias Message-ID: The DC voltage is low today, and the plasma is dark. Also, the chamber pressure is way too high, as well as it is difficult to obtain the impedance matching. Previous user (mitsuru1) also told me that he got the dark plasma. Would you, anyone who knows the machine well, please improve the situation ? Thank you... With my Ar/Cl2 recipe (koseki.rcp, initially copied from davegaas.rcp) Yesterday (operated normally) RF: set 200/ forward 202.9/ reflected 0.4 microwave: set 40/ forward 45/ reflected 1 DC bias: -59.6 pressure: 3.8mtorr stub: 975/900/50 Today (operating strangely) RF: set 200/ forward 202.9/ reflected 9.9 microwave: set 40/ forward 46/ reflected 2 DC bias: -27.8 pressure: 94.2mtorr stub: 1385/1330/1440 From lwchang at snf.stanford.edu Tue Apr 8 13:39:41 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 8 Apr 2008 13:39:41 -0700 Subject: Problem pquest SNF 2008-04-08 13:39:40: VAT POS 1000 PR 54mT Message-ID: looks like a problem with the pump From eenriquez at snf.stanford.edu Tue Apr 8 15:02:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Apr 2008 15:02:43 -0700 Subject: Problem pquest SNF 2008-04-08 13:09:03: low DC bias Message-ID: Turned the turbo pump back on. Jim Krugger is testing the system now. From eenriquez at snf.stanford.edu Tue Apr 8 15:02:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Apr 2008 15:02:49 -0700 Subject: Problem pquest SNF 2008-04-08 13:39:40: VAT POS 1000 PR 54mT Message-ID: Turned the turbo pump back on. Jim Krugger is testing the system now. From ifushman at snf.stanford.edu Tue Apr 15 11:06:12 2008 From: ifushman at snf.stanford.edu (ifushman at snf.stanford.edu) Date: Tue, 15 Apr 2008 11:06:12 -0700 Subject: Problem pquest SNF 2008-04-15 11:06:10: monthly clean Message-ID: Hi, When will the monthly clean be done for the pquest? Thanks, ilya From eenriquez at snf.stanford.edu Tue Apr 15 14:41:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Apr 2008 14:41:58 -0700 Subject: Comment pquest SNF 2008-04-15 14:41:57: Update monthly clean Message-ID: Will wet clean chamber tomorrow morning From eenriquez at snf.stanford.edu Wed Apr 16 18:21:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:21:38 -0700 Subject: Problem pquest SNF 2008-04-15 11:06:10: monthly clean Message-ID: Completed monthly wetclean From eenriquez at snf.stanford.edu Wed Apr 16 18:21:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:21:45 -0700 Subject: Comment pquest SNF 2008-04-15 14:41:57: Update monthly clean Message-ID: Completed monthly wetclean From eenriquez at snf.stanford.edu Wed Apr 16 18:21:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:21:52 -0700 Subject: Comment pquest SNF 2008-03-11 13:29:42: Chamber clean Message-ID: Completed monthly wetclean From bashar at snf.stanford.edu Wed Apr 16 22:07:01 2008 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Wed, 16 Apr 2008 22:07:01 -0700 Subject: Problem pquest SNF 2008-04-16 22:07:00: rf generator problem Message-ID: Does not tune From eenriquez at snf.stanford.edu Thu Apr 17 08:49:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 08:49:15 -0700 Subject: Problem pquest SNF 2008-04-17 08:49:13: RF gen not turning on Message-ID: Process controller has lost communication with the RF generator. RF gen works OK in manual. From eenriquez at snf.stanford.edu Thu Apr 17 08:51:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 08:51:19 -0700 Subject: Problem pquest SNF 2008-04-17 08:49:13: RF gen not turning on Message-ID: Shutting down the tool From eenriquez at snf.stanford.edu Thu Apr 17 08:51:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 08:51:41 -0700 Subject: Shutdown pquest SNF 2008-04-17 08:51:39: RF gen not turning on Message-ID: Process controller has lost communication with the RF generator. RF gen works OK in manual. From eenriquez at snf.stanford.edu Thu Apr 17 11:37:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 11:37:24 -0700 Subject: Shutdown pquest SNF 2008-04-17 08:51:39: RF gen not turning on Message-ID: The analog input was disabled on RF controller. Enable the analog input and tested with no problems. From eenriquez at snf.stanford.edu Thu Apr 17 11:38:01 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 11:38:01 -0700 Subject: Problem pquest SNF 2008-04-16 22:07:00: rf generator problem Message-ID: The analog input was disabled on RF controller. Enable the analog input and tested with no problems. From eenriquez at snf.stanford.edu Thu Apr 17 11:43:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 11:43:58 -0700 Subject: Shutdown pquest SNF 2008-04-17 11:43:57: Turbo pump not at speed Message-ID: Turbo lost speed while in the Idle mode. Unable to restart. Might have to replace. From eenriquez at snf.stanford.edu Fri Apr 18 08:36:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Apr 2008 08:36:29 -0700 Subject: Shutdown pquest SNF 2008-04-17 11:43:57: Turbo pump not at speed Message-ID: Power cycled the turbo pump controller. Turbo now is operational. Ran O2 clean for 30 minutes with no problems. Please monitor the turbo controller when running the tool. The speed indicator should be on "Normal" and not "Accelarating". From lwchang at snf.stanford.edu Fri Apr 18 16:21:11 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 18 Apr 2008 16:21:11 -0700 Subject: Problem pquest SNF 2008-04-18 16:21:11: ECR error Message-ID: closed the error window then the program is aborted. Not sure how to restart the prog. From lwchang at snf.stanford.edu Fri Apr 18 17:54:23 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 18 Apr 2008 17:54:23 -0700 Subject: Problem pquest SNF 2008-04-18 17:54:22: Cl2 gas low Message-ID: set 40sccm reading 1sccm From eenriquez at snf.stanford.edu Mon Apr 21 08:22:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Apr 2008 08:22:08 -0700 Subject: Problem pquest SNF 2008-04-18 16:21:11: ECR error Message-ID: User was able to restart the program. From eenriquez at snf.stanford.edu Mon Apr 21 08:28:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Apr 2008 08:28:21 -0700 Subject: Problem pquest SNF 2008-04-18 17:54:22: Cl2 gas low Message-ID: Adjusted the local Cl2 regulator to 18 psi. Flowed Cl2 at 43 sccm for 15 minutes without any problems. With the inlet pressure at 18 psi, the minimum controllable flow for Cl2 is 2.2 sccm.