Problem pquest SNF 2008-04-02 21:32:21: ECR error

wwang at snf.stanford.edu wwang at snf.stanford.edu
Wed Apr 2 21:32:22 PDT 2008


I came in when everything seems to be normal with the instrument. I loaded a test wafer and wanted to run "oxygen3" program. When I clicked the "Start" button, a dialog box popped up reporting an ECR error, and asked me to save the file to some local directory. I couldn't get back the original run-time menu after this. So I cancelled my process and my test wafer is still inside chamber.  




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