From ofidaner at snf.stanford.edu Thu Feb 14 13:56:27 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Thu, 14 Feb 2008 13:56:27 -0800 Subject: Problem pquest SNF 2008-02-14 13:56:27: alarm of Pressure Interlock and Process Pump Message-ID: From junbo at snf.stanford.edu Thu Feb 14 14:03:13 2008 From: junbo at snf.stanford.edu (junbo at snf.stanford.edu) Date: Thu, 14 Feb 2008 14:03:13 -0800 Subject: Problem pquest SNF 2008-02-14 14:03:12: Alarm of Pressure Interlock and Process Pump Message-ID: From eenriquez at snf.stanford.edu Fri Feb 15 08:45:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:45:43 -0800 Subject: Problem pquest SNF 2008-02-14 14:03:12: Alarm of Pressure Interlock and Process Pump Message-ID: Restarted the mechanical pump and turbo. Ran O2 clean. From eenriquez at snf.stanford.edu Fri Feb 15 08:45:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:45:50 -0800 Subject: Problem pquest SNF 2008-02-14 13:56:27: alarm of Pressure Interlock and Process Pump Message-ID: Restarted the mechanical pump and turbo. Ran O2 clean. From eenriquez at snf.stanford.edu Fri Feb 15 08:48:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:48:32 -0800 Subject: Comment pquest SNF 2008-01-24 07:42:06: Wafer slipped off load pins Message-ID: Broken pins had been replaced. No other wafer slippage has been reported since then. From eenriquez at snf.stanford.edu Fri Feb 15 08:50:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:50:51 -0800 Subject: Comment pquest SNF 2007-12-14 16:50:38: PQuest status 12-14-07 4:30 pm Message-ID: Noted From eenriquez at snf.stanford.edu Fri Feb 15 08:51:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:51:06 -0800 Subject: Comment pquest SNF 2007-12-14 14:54:50: Large vibration, wafer clamp problem Message-ID: Noted From eenriquez at snf.stanford.edu Fri Feb 15 08:53:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:53:36 -0800 Subject: Comment pquest SNF 2007-11-29 15:49:38: RF still inconsistent Message-ID: No other incosistent RF problem reported since the RF connections were retightened From gibby at snf.stanford.edu Sun Feb 24 10:56:06 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sun, 24 Feb 2008 10:56:06 -0800 Subject: Problem pquest SNF 2008-02-24 10:56:05: Small Object on chuck Message-ID: A small, rectangular piece, transparent and about 1 cm on a side is on the chuck. Backside He pressure is high (8.9 sccm). Use with caution. From eenriquez at snf.stanford.edu Tue Feb 26 08:55:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Feb 2008 08:55:45 -0800 Subject: Problem pquest SNF 2008-02-24 10:56:05: Small Object on chuck Message-ID: Removed a small plastic piece from the chuck and ran O2 clean. From jimkruger at snf.stanford.edu Wed Feb 27 12:04:32 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 27 Feb 2008 12:04:32 -0800 Subject: Problem pquest SNF 2008-02-27 12:04:31: PQuest: NO RF Message-ID: During training today, I could get no RF for any recipe tried. Plasma strikes OK but the RF unit blinks an error mesage. RF auto tune runs off to the end of travel. Neither SystemReset nor RF unit on/off helped. I would red-light it but I may have time to look at it again before Elmer may have time. The system is not usable without RF working. jim From eenriquez at snf.stanford.edu Thu Feb 28 14:41:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Feb 2008 14:41:45 -0800 Subject: Comment pquest SNF 2008-02-28 14:41:45: Update RF Message-ID: Ran O2 clean for 1 hour with no problems. Three other users have used the system without any problems.