From eenriquez at snf.stanford.edu Thu Jan 3 10:55:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:55:26 -0800 Subject: Shutdown pquest SNF 2008-01-03 10:55:26: Vacuum pump is out of oil Message-ID: Turbo pump shutdown because its backing pump was out of oil. From eenriquez at snf.stanford.edu Thu Jan 3 14:10:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:10:27 -0800 Subject: Shutdown pquest SNF 2008-01-03 10:55:26: Vacuum pump is out of oil Message-ID: Refilled vacuum pump with oil. Cycled wafer through the system and ran chamber O2 clean. From tdo at snf.stanford.edu Mon Jan 7 19:07:08 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Mon, 7 Jan 2008 19:07:08 -0800 Subject: Problem pquest SNF 2008-01-07 19:07:07: Vacuum pump failure Message-ID: Failure light on vacuum pump power supply on and pquest software reports alarm on process pump. Chamber is not pumped down. From eenriquez at snf.stanford.edu Tue Jan 8 12:08:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jan 2008 12:08:53 -0800 Subject: Problem pquest SNF 2008-01-07 19:07:07: Vacuum pump failure Message-ID: Vacuum pump leaked oil. Replaced the vacuum pump with Ray and Mike's help. Ran the O2 clean recipe with no problems. From koseki at snf.stanford.edu Tue Jan 8 23:33:23 2008 From: koseki at snf.stanford.edu (koseki at snf.stanford.edu) Date: Tue, 8 Jan 2008 23:33:23 -0800 Subject: Problem pquest SNF 2008-01-08 23:33:22: high chuck temp and low DC bias Message-ID: When I came in today, the chuck temperature was left at around 195C. After setting the chiller temperature to 0 C and waiting ~ 5hrs, chuck temp is still 50C. Also, the DC bias is unusually low as -4.9V (, which is usually -60V for my recipe) The RF5S power supply indicates "RF out". I rebooted all the unit, but the situation did not improve... My Si carrier wafer became purple color. I did not dare to etch my real sample in this condition... From eenriquez at snf.stanford.edu Wed Jan 9 12:02:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jan 2008 12:02:06 -0800 Subject: Problem pquest SNF 2008-01-08 23:33:22: high chuck temp and low DC bias Message-ID: The high temperature was caused by the chiller being left with the water purge on. Bashar has been running the system for the past 2 hours with no problems. From bashar at snf.stanford.edu Wed Jan 9 19:02:54 2008 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Wed, 9 Jan 2008 19:02:54 -0800 Subject: Shutdown pquest SNF 2008-01-09 19:02:54: Wafer stuck in etch chamber Message-ID: Caesar/Elmer ... please vent the chamber carefully .. I have a process wafer stuck inside. The carrier wafer is slightly tilted and there cannot be retrived by the mechanical arm. From eenriquez at snf.stanford.edu Thu Jan 10 12:50:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Jan 2008 12:50:25 -0800 Subject: Shutdown pquest SNF 2008-01-09 19:02:54: Wafer stuck in etch chamber Message-ID: Recovered the user's wafer. Wet cleaned the chuck and clamp. Cycled several wafers and ran a 45 min O2 clean. From bashar at snf.stanford.edu Thu Jan 10 18:07:49 2008 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Thu, 10 Jan 2008 18:07:49 -0800 Subject: Shutdown pquest SNF 2008-01-10 18:07:48: wafer broke in etch chamber Message-ID: I shut it down earlier in the day for the same reason ... but it shows that I enbaled it again .... wafer broke while the arm was trying to retrieve it. From eenriquez at snf.stanford.edu Fri Jan 11 11:02:54 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:02:54 -0800 Subject: Shutdown pquest SNF 2008-01-10 18:07:48: wafer broke in etch chamber Message-ID: Recovered user's wafer. Wet cleaned the chuck area and clamp asssembly. Lubricated the lead screw. Cycled several wafers with no problems. Ran O2 clean. From tdo at snf.stanford.edu Tue Jan 15 20:27:08 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 15 Jan 2008 20:27:08 -0800 Subject: Comment pquest SNF 2008-01-15 20:27:07: flashlight Message-ID: flashlight doesn't work From mtang at snf.stanford.edu Thu Jan 17 13:45:34 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 17 Jan 2008 13:45:34 -0800 Subject: Comment pquest SNF 2008-01-17 13:45:33: New Reservation Limit on pquest Message-ID: Dear pquest User Community: This is to inform everyone that effective immediately, there is a new reservations policy at pquest. Advance reservations are limited to four hours per day during prime time, no more than one week in advance. Prime time is 8 am-6 pm. The change has not yet been made on Coral, but until it is, any reservations that exceed this is subject to deletion. Please remember this is a shared tool and to be considerate of others' use -- give advance warning (a week?) to others in the user community if you make long reservations, even if off-hours. And be willing to work with each other in sharing access as needed. Thanks for your attention! Mary From gibby at snf.stanford.edu Mon Jan 21 15:40:35 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Mon, 21 Jan 2008 15:40:35 -0800 Subject: Shutdown pquest SNF 2008-01-21 15:40:34: Wafer Broken on unloading Message-ID: Not sure what happened, but my wafer broke on unloading. Please clean ASAP. From eenriquez at snf.stanford.edu Tue Jan 22 08:56:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jan 2008 08:56:43 -0800 Subject: Shutdown pquest SNF 2008-01-21 15:40:34: Wafer Broken on unloading Message-ID: Cleaned chamber. Found two of the pins are loose and needs to be replaced but user wants to take a chance and run anyway. Will replace the pins after the user is done. From eenriquez at snf.stanford.edu Tue Jan 22 08:57:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jan 2008 08:57:02 -0800 Subject: Problem pquest SNF 2008-01-22 08:57:01: Need to replace wafer pins Message-ID: From eenriquez at snf.stanford.edu Tue Jan 22 14:42:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jan 2008 14:42:55 -0800 Subject: Shutdown pquest SNF 2008-01-22 14:42:55: Replacing broken wafer pins Message-ID: Had to remove the clamp assembly in order to remove the broken pieces of the wafer lift pins. Should be ready by 12 noon tomorrow. From eenriquez at snf.stanford.edu Wed Jan 23 10:19:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jan 2008 10:19:37 -0800 Subject: Shutdown pquest SNF 2008-01-22 14:42:55: Replacing broken wafer pins Message-ID: Replaced broken wafers pins. Jim K will cycle wafers and run an O2 clean as part of his training session. From eenriquez at snf.stanford.edu Wed Jan 23 10:20:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jan 2008 10:20:04 -0800 Subject: Problem pquest SNF 2008-01-22 08:57:01: Need to replace wafer pins Message-ID: Replaced wafer pins. From jimkruger at snf.stanford.edu Wed Jan 23 12:30:35 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 23 Jan 2008 12:30:35 -0800 Subject: Shutdown pquest SNF 2008-01-23 12:30:35: He blowby high, clsmp sensor slipped? Message-ID: Clamps sensor slipped a cog? He blowby was high even before slippage. From eenriquez at snf.stanford.edu Wed Jan 23 14:39:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jan 2008 14:39:43 -0800 Subject: Shutdown pquest SNF 2008-01-23 12:30:35: He blowby high, clsmp sensor slipped? Message-ID: Adjusted the wafer clamp leveling. From gibby at snf.stanford.edu Thu Jan 24 07:42:06 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 24 Jan 2008 07:42:06 -0800 Subject: Comment pquest SNF 2008-01-24 07:42:06: Wafer slipped off load pins Message-ID: Elmer helped remove the wafer and is working on the problem. Users are advised to observe loading and unloading of their wafers.