Problem pquest SNF 2008-01-08 23:33:22: high chuck temp and low DC bias

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 9 12:02:06 PST 2008

Previous message: Problem pquest SNF 2008-01-08 23:33:22: high chuck temp and low DC bias
Next message: Shutdown pquest SNF 2008-01-09 19:02:54: Wafer stuck in etch chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

The high temperature was caused by the chiller being left with the water purge on.  Bashar has been running the system for the past 2 hours with no problems.

Previous message: Problem pquest SNF 2008-01-08 23:33:22: high chuck temp and low DC bias
Next message: Shutdown pquest SNF 2008-01-09 19:02:54: Wafer stuck in etch chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list