Problem pquest SNF 2008-01-08 23:33:22: high chuck temp and low DC bias

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 9 12:02:06 PST 2008


The high temperature was caused by the chiller being left with the water purge on.  Bashar has been running the system for the past 2 hours with no problems.




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