Shutdown pquest SNF 2008-01-09 19:02:54: Wafer stuck in etch chamber

bashar at snf.stanford.edu bashar at snf.stanford.edu
Wed Jan 9 19:02:54 PST 2008


Caesar/Elmer ... please vent the chamber carefully .. I have a process wafer stuck inside.  The carrier wafer is slightly tilted and there cannot be retrived by the mechanical arm.




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