Shutdown pquest SNF 2008-01-09 19:02:54: Wafer stuck in etch chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jan 10 12:50:25 PST 2008


Recovered the user's wafer.  Wet cleaned the chuck and clamp.  Cycled several wafers and ran a 45 min O2 clean.




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