Shutdown pquest SNF 2008-01-10 18:07:48: wafer broke in etch chamber

bashar at snf.stanford.edu bashar at snf.stanford.edu
Thu Jan 10 18:07:49 PST 2008


I shut it down earlier in the day for the same reason ... but it shows that I enbaled it again .... wafer broke while the arm was trying to retrieve it.




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