Shutdown pquest SNF 2008-01-10 18:07:48: wafer broke in etch chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 11 11:02:54 PST 2008


Recovered user's wafer.  Wet cleaned the chuck area and clamp asssembly.  Lubricated the lead screw.  Cycled several wafers with no problems.  Ran O2 clean.




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