From jimkruger at snf.stanford.edu Mon Jul 7 11:16:37 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 7 Jul 2008 11:16:37 -0700 Subject: Problem pquest SNF 2008-07-07 11:16:36: PQ Still leaks? Message-ID: By running "_TST1", I conclude that there is still a chamber leak (FerroFluidic feed-thru) and that there is still a leak past the closed gate valve . This is based on watching the foreline pressure as wll as the chmber pressure during the test. jim From lwchang at snf.stanford.edu Sat Jul 12 16:20:01 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 12 Jul 2008 16:20:01 -0700 Subject: Problem pquest SNF 2008-07-12 16:20:00: power glitch! can not operate. sample still in the chamber Message-ID: From ericp at snf.stanford.edu Sat Jul 12 18:51:05 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 12 Jul 2008 18:51:05 -0700 Subject: Problem pquest SNF 2008-07-12 18:51:03: may need GV recal and zero Message-ID: Ed reset the pumps, but the GV may need recal. From lwchang at snf.stanford.edu Sun Jul 13 15:10:35 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sun, 13 Jul 2008 15:10:35 -0700 Subject: Shutdown pquest SNF 2008-07-13 15:10:35: previous wafer still in the chamber, can't get it out Message-ID: From cbaxter at snf.stanford.edu Sun Jul 13 16:40:30 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Jul 2008 16:40:30 -0700 Subject: Shutdown pquest SNF 2008-07-13 15:10:35: previous wafer still in the chamber, can't get it out Message-ID: Recovered wafer from chamber. From eenriquez at snf.stanford.edu Mon Jul 14 10:45:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 10:45:13 -0700 Subject: Problem pquest SNF 2008-07-12 16:20:00: power glitch! can not operate. sample still in the chamber Message-ID: System has been reset. Ran O2 clean for 30 minutes. From eenriquez at snf.stanford.edu Mon Jul 14 10:46:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 10:46:48 -0700 Subject: Problem pquest SNF 2008-07-12 18:51:03: may need GV recal and zero Message-ID: Retaught the throttle valve and zeroed. Ran O2 clean. From mdickey at snf.stanford.edu Tue Jul 15 11:42:04 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 15 Jul 2008 11:42:04 -0700 Subject: Shutdown pquest SNF 2008-07-15 11:42:03: gate valve Message-ID: Doing maintenance on the system From eenriquez at snf.stanford.edu Tue Jul 15 15:18:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 15:18:27 -0700 Subject: Shutdown pquest SNF 2008-07-15 11:42:03: gate valve Message-ID: Tried to install new ferrofluidic seal but it was the wrong size (body was too short). We opened the gate valve and found wafer chips on the o-ring. We replaced the o-ring and retaught the valve. Also replaced the backside He cooling o-ring. Ran an O2 plasma for 1 hour. From krivoire at snf.stanford.edu Tue Jul 15 19:30:39 2008 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Tue, 15 Jul 2008 19:30:39 -0700 Subject: Shutdown pquest SNF 2008-07-15 19:30:39: wafer broke during unloading Message-ID: When I was unloading my wafer, the robot arm smashed it. It also looks like the orange seal got messed up. From cbaxter at snf.stanford.edu Tue Jul 15 20:51:19 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Jul 2008 20:51:19 -0700 Subject: Shutdown pquest SNF 2008-07-15 19:30:39: wafer broke during unloading Message-ID: Vented chamber and vacuum broken wafer, noticed wafer was jerking out of place when lifter is moving from clamp to to lift, adjusted lifter pin (5 o'clock position) and checked handoff. From tdo at snf.stanford.edu Tue Jul 15 22:12:33 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 15 Jul 2008 22:12:33 -0700 Subject: Shutdown pquest SNF 2008-07-15 22:12:33: another wafer stuck in the chamber Message-ID: When I went to unload the wafer after my seasoning run (30 mins GaAs etch), the orange seal stuck to the back of the wafer as the pins lifted it. This pulled the wafer off one of the pins, and the wafer is now sitting on an angle, only on two pins. From cbaxter at snf.stanford.edu Wed Jul 16 01:57:25 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 16 Jul 2008 01:57:25 -0700 Subject: Shutdown pquest SNF 2008-07-15 22:12:33: another wafer stuck in the chamber Message-ID: Recovered wafer and inserted oring back... From mdickey at snf.stanford.edu Wed Jul 16 14:22:07 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 16 Jul 2008 14:22:07 -0700 Subject: Comment pquest SNF 2008-07-16 14:22:07: Gate valve Message-ID: Cleaned gate valve o ring and replaced chuck O ring From lwchang at snf.stanford.edu Wed Jul 16 17:03:47 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 16 Jul 2008 17:03:47 -0700 Subject: Problem pquest SNF 2008-07-16 17:03:47: RF out Message-ID: RF generator could not stabilize. Running 10W getting FW25W and REV 15W From eenriquez at snf.stanford.edu Thu Jul 17 09:35:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:35:56 -0700 Subject: Problem pquest SNF 2008-07-16 17:03:47: RF out Message-ID: Ran the user's recipe and observed the same problem. I order to tune the RF I had to manually set the the 0.5 on both the tuning caps and then I simultaneously placed them in the Auto mode. I believe the tuning problem is caused by tool low of a pressure (5 mT) when attempting to strike a plasma. If the plasma does not strike in time, the matching network gets lost and drives to its limits. From eenriquez at snf.stanford.edu Thu Jul 17 09:36:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:36:30 -0700 Subject: Comment pquest SNF 2008-07-16 14:22:07: Gate valve Message-ID: Noted From eenriquez at snf.stanford.edu Thu Jul 17 09:36:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:36:49 -0700 Subject: Comment pquest SNF 2008-06-27 14:47:18: Update leak rate Message-ID: Noted From bashar at snf.stanford.edu Sat Jul 19 11:05:13 2008 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Sat, 19 Jul 2008 11:05:13 -0700 Subject: Shutdown pquest SNF 2008-07-19 11:05:12: Wafer stuck. Message-ID: Wafer stuck during unload. From eenriquez at snf.stanford.edu Mon Jul 21 15:06:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:06:30 -0700 Subject: Shutdown pquest SNF 2008-07-19 11:05:12: Wafer stuck. Message-ID: Recovered the stuck wafers and replaced the back side helium o-ring. Also installed the new ferrofluidic seal. Ran a 15 minute O2 plasma (OXYGEN recipe). Need to run another 45 minutes before trying a test. From eenriquez at snf.stanford.edu Mon Jul 21 15:07:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:07:56 -0700 Subject: Comment pquest SNF 2008-07-21 15:07:56: Update Message-ID: Installed new ferrofluidic seal. Ran 15 minute O2 clean (Oxygen recipe). Need to run an additional 45 minutes before trying a test. Wafer loaded and unloaded with no problems. From krivoire at snf.stanford.edu Wed Jul 23 14:14:30 2008 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Wed, 23 Jul 2008 14:14:30 -0700 Subject: Shutdown pquest SNF 2008-07-23 14:14:29: wafer broke during unloading Message-ID: robot arm smashed the wafer during unloading. this has happened a few times to me in the past few weeks, although it never happened before that. From eenriquez at snf.stanford.edu Wed Jul 23 18:07:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 18:07:34 -0700 Subject: Shutdown pquest SNF 2008-07-23 14:14:29: wafer broke during unloading Message-ID: Cleaned the chamber. Replaced the platten o-ring with an one from the older batch. Cycle wafer and ran an O2 clean for 30 minute. From lwchang at snf.stanford.edu Wed Jul 23 18:40:24 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 23 Jul 2008 18:40:24 -0700 Subject: Shutdown pquest SNF 2008-07-23 18:40:24: wafer stuck Message-ID: The wafer is now sitting on an angle, only on two pins when the loading arm tried to unload the wafer...hit esc, now loading arm is in the middle of the chamber and loadlock. From eenriquez at snf.stanford.edu Thu Jul 24 13:10:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jul 2008 13:10:26 -0700 Subject: Shutdown pquest SNF 2008-07-23 18:40:24: wafer stuck Message-ID: Recovered the user's wafer. Noticed that the wafer was sticking to the platten o-ring when I clamped and unclamped the wafer. Cleaned and reseated the oring. Ran an O2 clean without a wafer for 1 hour. Cycled a wafer in and out of the chamber 10 times without any problems. From krivoire at snf.stanford.edu Thu Jul 24 17:38:46 2008 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 24 Jul 2008 17:38:46 -0700 Subject: Shutdown pquest SNF 2008-07-24 17:38:45: wafer on 2 of 3 pins unloading Message-ID: When unloading my wafer (after one successful load and unload in the session), the wafer did not lift up on pins correctly. Right now, wafer is on two of three pins. I hit ESC before the robot arm could go in and smash the wafer. I think the pin it fell off is the same one that Li-Wen's wafer fell off yesterday (the one closest to the loading). Maybe this pin can be adjusted? From jimkruger at snf.stanford.edu Fri Jul 25 11:31:26 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 25 Jul 2008 11:31:26 -0700 Subject: Problem pquest SNF 2008-07-25 11:31:26: Wafer lost in system Message-ID: Testing wafer load/unload, the dummy wafer was pushed off the pins during unload, is sitting at an angle visible form the left-hand window. Will likely be broken if the clamp is operated before it is removed. From eenriquez at snf.stanford.edu Fri Jul 25 11:54:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jul 2008 11:54:24 -0700 Subject: Comment pquest SNF 2008-07-21 15:07:56: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 25 11:59:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jul 2008 11:59:59 -0700 Subject: Comment pquest SNF 2008-07-25 11:59:58: Update Message-ID: Wafer is still sticking to the platten o-ring. Prior to Jim loosing a wafer in the chamber, we had recovered krivoire's wafer and adjusted the wafer clamp force by adjusting the clamp down sensor. From mdickey at snf.stanford.edu Fri Jul 25 14:14:27 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:14:27 -0700 Subject: Shutdown pquest SNF 2008-07-24 17:38:45: wafer on 2 of 3 pins unloading Message-ID: Recovered wafer. Jim to try loading one more time. From jimkruger at snf.stanford.edu Fri Jul 25 14:34:01 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:34:01 -0700 Subject: Shutdown pquest SNF 2008-07-25 14:34:01: wafer recovered but system left "offline" Message-ID: Still no understanding of root cause for wafer loss on "Unload" From jimkruger at snf.stanford.edu Fri Jul 25 14:36:39 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:36:39 -0700 Subject: Shutdown pquest SNF 2008-07-25 14:36:39: system left "offline" Message-ID: From cbaxter at snf.stanford.edu Mon Jul 28 04:59:00 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Jul 2008 04:59:00 -0700 Subject: Comment pquest SNF 2008-07-28 04:58:59: Wafer transfer Message-ID: Adjusted the all 3 lifter pin hieght and center load arm still need fine adjustment. will continue again tonight. From cbaxter at snf.stanford.edu Tue Jul 29 23:33:48 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Jul 2008 23:33:48 -0700 Subject: Comment pquest SNF 2008-07-29 23:33:48: Clamp Message-ID: The clamp teflon insert is worn out causing high backside he leak and wafer breakage, John Shott look at the bad clamp and He will call the vendor tomorrow morning and check if part is avail. From cbaxter at snf.stanford.edu Thu Jul 31 02:02:33 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 31 Jul 2008 02:02:33 -0700 Subject: Comment pquest SNF 2008-07-31 02:02:32: Clamping Message-ID: Installed original upper clamp and changed chuck he oring from silicon to viton. The viton oring is harder material, the best backside he leak I can ger is 7.9sccm it won't get any lower but the good thing is the wafer is not bouncing off from the lifter pins when it unload, I cycled the tool load and unload w/out losing a wafer. Will ask John shott to check it again in the morning before releasing the tool.