Shutdown pquest SNF 2008-07-15 19:30:39: wafer broke during unloading

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Jul 15 20:51:19 PDT 2008


Vented chamber and vacuum broken wafer, noticed wafer
was jerking out of place when lifter is moving from clamp to
to lift, adjusted lifter pin (5 o'clock position) and checked
handoff.




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