Shutdown pquest SNF 2008-07-15 22:12:33: another wafer stuck in the chamber

tdo at snf.stanford.edu tdo at snf.stanford.edu
Tue Jul 15 22:12:33 PDT 2008


When I went to unload the wafer after my seasoning run (30 mins GaAs etch), the orange seal stuck to the back of the wafer as the pins lifted it.  This pulled the wafer off one of the pins, and the wafer is now sitting on an angle, only on two pins.  




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