Problem pquest SNF 2008-07-16 17:03:47: RF out

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 17 09:35:56 PDT 2008


Ran the user's recipe and observed the same problem.  I order to tune the RF I had to manually set the the 0.5 on both the tuning caps and then I simultaneously placed them in the Auto mode.  I believe the tuning problem is caused by tool low of a pressure (5 mT) when attempting to strike a plasma.  If the plasma does not strike in time, the matching network gets lost and drives to its limits.




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