Shutdown pquest SNF 2008-07-19 11:05:12: Wafer stuck.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 21 15:06:30 PDT 2008


Recovered the stuck wafers and replaced the back side helium o-ring.  Also installed the new ferrofluidic seal.  Ran a 15 minute O2 plasma (OXYGEN recipe).  Need to run another 45 minutes before trying a test.




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