Shutdown pquest SNF 2008-07-23 14:14:29: wafer broke during unloading

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 23 18:07:34 PDT 2008


Cleaned the chamber.  Replaced the platten o-ring with an one from the older batch. Cycle wafer and ran an O2 clean for 30 minute.




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