Shutdown pquest SNF 2008-07-23 18:40:24: wafer stuck

lwchang at snf.stanford.edu lwchang at snf.stanford.edu
Wed Jul 23 18:40:24 PDT 2008


The wafer is now sitting on an angle, only on two pins when the loading arm tried to unload the wafer...hit esc, now loading arm is in the middle of the chamber and loadlock.




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