Shutdown pquest SNF 2008-07-23 18:40:24: wafer stuck

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 24 13:10:26 PDT 2008


Recovered the user's wafer.  Noticed that the wafer was sticking to the platten o-ring when I clamped and unclamped the wafer.  Cleaned and reseated the oring.  Ran an O2 clean without a wafer for 1 hour.  Cycled a wafer in and out of the chamber 10 times without any problems.




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