From kaimeifu at snf.stanford.edu Tue Jun 3 20:32:27 2008 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Tue, 3 Jun 2008 20:32:27 -0700 Subject: Problem pquest SNF 2008-06-03 20:32:26: MW power dropped during pre-etch Message-ID: During my preetch the MW power dropped from 200W F 0 R to 140 W F 0 R (note- it was not a tuning issue). I restarted the etch and the power was back up to 200W but users should keep an eye on it. From eenriquez at snf.stanford.edu Wed Jun 4 14:03:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Jun 2008 14:03:02 -0700 Subject: Problem pquest SNF 2008-05-21 16:25:07: low Cl2 flows still running high Message-ID: Re-oriented the Cl2 gas regulator so that the in coming gas goes into the high pressure (HP) side of the regulator instead of the low press (LP). Set the pressure to 8 psi. The pressure drops to 5 psi when the flow is at maximum (43 sccm) From eenriquez at snf.stanford.edu Wed Jun 4 14:03:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Jun 2008 14:03:15 -0700 Subject: Comment pquest SNF 2008-05-21 18:59:33: Cl2 Update Message-ID: Noted From eenriquez at snf.stanford.edu Wed Jun 4 14:05:40 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Jun 2008 14:05:40 -0700 Subject: Comment pquest SNF 2008-06-04 14:05:39: Completed wet clean Message-ID: Completed the monthly PM and performed the chamber wet clean. From jimkruger at snf.stanford.edu Thu Jun 5 18:38:19 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 5 Jun 2008 18:38:19 -0700 Subject: Comment pquest SNF 2008-06-05 18:38:18: Microwave Power control Message-ID: I had not known, but the Microwave "Powerset" knob can funtion as a power limiter even for remote control (standard operation) of PQuest. The knob seems to have been adjusted low and was preventing full power cleans (Oxygen3). I have it re-set OK now but the shaft seems to be slipping so the index number does not correspond to the potentiometer position. Pot may be noisy as well according to Tom ("tdo"). From tdo at snf.stanford.edu Thu Jun 5 20:19:06 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 5 Jun 2008 20:19:06 -0700 Subject: Comment pquest SNF 2008-06-05 20:19:06: Microwave power supply pot Message-ID: Followup to jimkruger's comment earlier today: When I ran the system, I ran an oxygen recipe without incident, then when I switched to run a dummy GaAs etch recipe, the microwave power (set 200W) would not stabilize. The forward and reverse power values varied on the order of 10W every second or so. The behavior stopped when I wiggled / turned the Power supply knob on the microwave power supply. From gibby at snf.stanford.edu Sat Jun 7 09:39:41 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 7 Jun 2008 09:39:41 -0700 Subject: Problem pquest SNF 2008-06-07 09:39:41: Depositoin on Viewports Message-ID: Not sure who's running a chemistry that caused this.... From tdo at snf.stanford.edu Tue Jun 10 09:08:56 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 10 Jun 2008 09:08:56 -0700 Subject: Problem pquest SNF 2008-06-10 09:08:55: could not reach max microwave power Message-ID: During my first 2 runs (oxygen.rcp, and ethrush2.rcp) I could not achieve the desired microwave forward power (reverse power was <2W). for example, ethrush2 specifies 200W -- I could only get about 165W out of it. I stopped the recipe, power cycled the microwave p/s and everything worked the next run. From krivoire at snf.stanford.edu Wed Jun 11 13:39:47 2008 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Wed, 11 Jun 2008 13:39:47 -0700 Subject: Shutdown pquest SNF 2008-06-11 13:39:46: broken wafer in chamber Message-ID: the robot arm smashed my wafer when it went to unload it, I don't know why. If my chip could be saved, that would be fantastic. From eenriquez at snf.stanford.edu Wed Jun 11 19:03:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jun 2008 19:03:21 -0700 Subject: Comment pquest SNF 2008-06-11 19:03:19: Update Message-ID: Recovered the user's wafer and wiped down the platten. The backing pump shutoff during the post chamber open O2 clean. Noticed that the process continued running without any alarms. It looks like most of the recipes have the Tolerance Check Delay time set at 9999. The result of this is that the system would never alarm for any faults. We believe the pump shut off because of high exhaust back pressure. Need to troubleshoot cause of high back pressure. Possible that we need to replace the exhaust line. From cbaxter at snf.stanford.edu Wed Jun 11 21:23:49 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Jun 2008 21:23:49 -0700 Subject: Shutdown pquest SNF 2008-06-11 13:39:46: broken wafer in chamber Message-ID: Drained the pump fomblin oil and cleaned site glass, re-use the same fomblin and added two more bottle of fomlin oil 16/6. Ramp up turbo pump and run o2 clean twice w/out problem. From mdickey at snf.stanford.edu Tue Jun 17 06:20:54 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jun 2008 06:20:54 -0700 Subject: Problem pquest SNF 2008-06-17 06:20:54: BCL3 Message-ID: There is a problem with the gas bottle BCL3 chiller not heating up. Do not run and BCL3 until problem is fixed From mdickey at snf.stanford.edu Tue Jun 17 08:14:29 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jun 2008 08:14:29 -0700 Subject: Problem pquest SNF 2008-06-17 06:20:54: BCL3 Message-ID: Chiller set point and been readjusted and the delivery pressure at the bottle has stabilized. Currently 5.2 psi and climbing. Should be ok to use now From shott at snf.stanford.edu Tue Jun 17 09:32:24 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 17 Jun 2008 09:32:24 -0700 Subject: Comment pquest SNF 2008-06-17 09:32:23: Replaced upper panel meter .... Message-ID: I've replace the long-failed upper forward microwave power readout (above the microwave source) with a new Acculex DP-652 3 1/2 digit 2V panel meter. I also have a spare that will soon be placed in the in-lab parts storage cabinet. Thanks, John From tdo at snf.stanford.edu Tue Jun 24 23:13:28 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 24 Jun 2008 23:13:28 -0700 Subject: Shutdown pquest SNF 2008-06-24 23:13:27: loading/unloading problem Message-ID: When trying to unload the wafer, it fell off the pin closest to the wall. It looked as if one of the pins was rotated in the wrong direction so that the groove did not align with the wafer. Cesar opened and retrieved my wafer. The clamp holding the pin (the one towards the wall) was loose. Cesar could not tighten the pin, and the pin would repeatedly rotate our of alignment when the clamp was raised. From cbaxter at snf.stanford.edu Wed Jun 25 00:01:03 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Jun 2008 00:01:03 -0700 Subject: Comment pquest SNF 2008-06-25 00:01:02: Broken vesple lifter pin. Message-ID: Vented chamber and found one of the vesple lifter pin (4 o'clock position) broke and I was able to removed the vesple pin and the small piece on the lifter pin clamp. From cbaxter at snf.stanford.edu Wed Jun 25 00:02:18 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Jun 2008 00:02:18 -0700 Subject: Comment pquest SNF 2008-06-25 00:02:18: Message-ID: From cbaxter at snf.stanford.edu Wed Jun 25 00:03:09 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Jun 2008 00:03:09 -0700 Subject: Comment pquest SNF 2008-06-25 00:03:06: The vesple lifter pin broke. Message-ID: From eenriquez at snf.stanford.edu Wed Jun 25 16:54:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 16:54:56 -0700 Subject: Comment pquest SNF 2008-06-25 00:03:06: The vesple lifter pin broke. Message-ID: Installed new lifter pin. Found the wafer clamp tensioner was binding. Realigned one of the clamp mounting post. Also replaced the backside helium oring seal. Cleaned the gate valve and oring. Found several wafer pieces resting on the o-ring. From eenriquez at snf.stanford.edu Wed Jun 25 16:55:07 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 16:55:07 -0700 Subject: Comment pquest SNF 2008-06-25 00:02:18: Message-ID: Installed new lifter pin. Found the wafer clamp tensioner was binding. Realigned one of the clamp mounting post. Also replaced the backside helium oring seal. Cleaned the gate valve and oring. Found several wafer pieces resting on the o-ring. From eenriquez at snf.stanford.edu Wed Jun 25 16:55:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 16:55:18 -0700 Subject: Comment pquest SNF 2008-06-25 00:01:02: Broken vesple lifter pin. Message-ID: Installed new lifter pin. Found the wafer clamp tensioner was binding. Realigned one of the clamp mounting post. Also replaced the backside helium oring seal. Cleaned the gate valve and oring. Found several wafer pieces resting on the o-ring. From eenriquez at snf.stanford.edu Wed Jun 25 16:55:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 16:55:28 -0700 Subject: Comment pquest SNF 2008-06-17 09:32:23: Replaced upper panel meter .... Message-ID: Noted From eenriquez at snf.stanford.edu Wed Jun 25 16:58:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 16:58:53 -0700 Subject: Comment pquest SNF 2008-06-25 16:58:53: Update Message-ID: Cycled wafers through the system. Now running a plasma clean after Installing a new lifter pin. Realigning one of the clamp mounting post. Also replaced the backside helium oring seal. Cleaned the gate valve and oring. From eenriquez at snf.stanford.edu Wed Jun 25 18:50:07 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 18:50:07 -0700 Subject: Shutdown pquest SNF 2008-06-24 23:13:27: loading/unloading problem Message-ID: Installed new lifter pin. Found the wafer clamp tensioner was binding. Realigned one of the clamp mounting post. Also replaced the backside helium oring seal. Cleaned the gate valve and oring. Found several wafer pieces resting on the o-ring. Ran O2 plasma. Leak rate = 16 mT/min. Will leak rate again tomorrow. From eenriquez at snf.stanford.edu Wed Jun 25 18:50:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 18:50:26 -0700 Subject: Comment pquest SNF 2008-06-25 16:58:53: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Jun 25 18:56:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jun 2008 18:56:10 -0700 Subject: Comment pquest SNF 2008-06-25 18:56:09: Update Message-ID: Leak rate is high at 16mT/min, if still high tomorrow, we'll need to leak check the system. Also, the loadlock smells of pump oil. We will change the pump oil tomorrow. From eenriquez at snf.stanford.edu Thu Jun 26 07:23:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jun 2008 07:23:38 -0700 Subject: Comment pquest SNF 2008-06-04 14:05:39: Completed wet clean Message-ID: Noted From eenriquez at snf.stanford.edu Thu Jun 26 08:15:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jun 2008 08:15:27 -0700 Subject: Comment pquest SNF 2008-06-26 08:15:27: Update Message-ID: Completed the loadlock pump oil change. From eenriquez at snf.stanford.edu Thu Jun 26 14:50:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jun 2008 14:50:36 -0700 Subject: Comment pquest SNF 2008-06-26 14:50:35: Update leak rate Message-ID: Leak rate is about 12 mT/min. Rate of pressure rise does not respond like an external leak because it slows down over time (or the higher the pressure goes). Its acting more like out gassing or a virtual leak. Requires more troubleshooting. From mcvittie at snf.stanford.edu Fri Jun 27 09:38:34 2008 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Fri, 27 Jun 2008 09:38:34 -0700 Subject: Comment pquest SNF 2008-06-26 14:50:35: Update leak rate Message-ID: <4865178A.7080502@snf.stanford.edu> eenriquez at snf.stanford.edu wrote: > Leak rate is about 12 mT/min. Rate of pressure rise does not respond like an external leak because it slows down over time (or the higher the pressure goes). Its acting more like out gassing or a virtual leak. Requires more troubleshooting. > > Elmer, I did some leak testing on the PQ a few weeks ago. I verified that the gate valve is leaking and that the amount of leakage is inconsistent, i.e. it changes when the valve is opened and closed. So without repairing the valve, I think it is hard to conclude much about the nature of a leak. Jim From eenriquez at snf.stanford.edu Fri Jun 27 14:46:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Jun 2008 14:46:09 -0700 Subject: Comment pquest SNF 2008-06-26 14:50:35: Update leak rate Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 27 14:46:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Jun 2008 14:46:19 -0700 Subject: Comment pquest SNF 2008-06-11 19:03:19: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 27 14:46:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Jun 2008 14:46:27 -0700 Subject: Comment pquest SNF 2008-06-25 18:56:09: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 27 14:46:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Jun 2008 14:46:37 -0700 Subject: Comment pquest SNF 2008-06-26 08:15:27: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri Jun 27 14:47:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Jun 2008 14:47:19 -0700 Subject: Comment pquest SNF 2008-06-27 14:47:18: Update leak rate Message-ID: Leak checked system using a He leak detector. Found an intermittent leak at the wafer clamp ferrofluidic feedthrough. The magnitude of the leak changes when the clamp is raised or lowered. Will need to order a new feedthrough. Gate valve still has a small leak. Leak rate = -6 mT/min. Since the gate valve is normaly open during process, the leak will not affect the process.