Problem pquest SNF 2008-06-03 20:32:26: MW power dropped during pre-etch

kaimeifu at snf.stanford.edu kaimeifu at snf.stanford.edu
Tue Jun 3 20:32:27 PDT 2008


During my preetch the MW power dropped from 200W F 0 R to 140 W F 0 R (note- it was not a tuning issue).  I restarted the etch and the power was back up to 200W but users should keep an eye on it.




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