Shutdown pquest SNF 2008-06-11 13:39:46: broken wafer in chamber

[cbaxter at snf.stanford.edu]

Drained  the pump fomblin oil and cleaned site glass,
re-use the same fomblin and added two more bottle of
fomlin oil 16/6. Ramp up turbo pump and run o2 clean
twice w/out problem.