Comment pquest SNF 2008-06-25 16:58:53: Update

eenriquez at eenriquez at
Wed Jun 25 16:58:53 PDT 2008

Cycled wafers through the system.  Now running a plasma clean after Installing a new lifter pin.  Realigning one of the clamp mounting post.  Also replaced the backside helium oring seal. Cleaned the gate valve and oring. 

More information about the pquest-pcs mailing list