Shutdown pquest SNF 2008-06-24 23:13:27: loading/unloading problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 25 18:50:07 PDT 2008


Installed new lifter pin.  Found the wafer clamp tensioner was binding.  Realigned one of the clamp mounting post.  Also replaced the backside helium oring seal.
Cleaned the gate valve and oring.  Found several wafer pieces resting on the o-ring.  
Ran O2 plasma.  Leak rate = 16 mT/min.  Will leak rate again tomorrow.




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