Comment pquest SNF 2008-06-27 14:47:18: Update leak rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 27 14:47:19 PDT 2008


Leak checked system using a He leak detector.  Found an intermittent leak at the wafer clamp ferrofluidic feedthrough.  The magnitude of the leak changes when the clamp is raised or lowered.  Will need to order a new feedthrough.
Gate valve still has a small leak.  Leak rate =  -6 mT/min.  Since the gate valve is normaly open during process, the leak will not affect the process.




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