From jimkruger at snf.stanford.edu Tue Mar 4 16:40:29 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:40:29 -0800 Subject: Shutdown pquest SNF 2008-03-04 16:40:26: Broken wafer in system Message-ID: Wafer broken by "load, unload without vent, load". Should have vented to check wafer centering but did not. please save the chip glued to wafer center if possible. From eenriquez at snf.stanford.edu Wed Mar 5 09:44:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Mar 2008 09:44:57 -0800 Subject: Shutdown pquest SNF 2008-03-04 16:40:26: Broken wafer in system Message-ID: Removed broken wafer and cleaned the platten. Need to run O2 clean and cycle wafers From eenriquez at snf.stanford.edu Thu Mar 6 06:58:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Mar 2008 06:58:49 -0800 Subject: Problem pquest SNF 2008-02-27 12:04:31: PQuest: NO RF Message-ID: Problem has not re-occured. From eenriquez at snf.stanford.edu Thu Mar 6 06:58:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Mar 2008 06:58:55 -0800 Subject: Comment pquest SNF 2008-02-28 14:41:45: Update RF Message-ID: Problem has not re-occured. From faraon at snf.stanford.edu Sun Mar 9 22:09:39 2008 From: faraon at snf.stanford.edu (faraon at snf.stanford.edu) Date: Sun, 9 Mar 2008 22:09:39 -0700 Subject: Problem pquest SNF 2008-03-09 22:09:38: low BCl3 flow in pquest Message-ID: The flow of BCl3 in Pquest was reading 0.5sccm while in the recipe it was set to 10sccm. I suppose that either the BCl3 gas tank ran out of gas or there is a problem with the flow meter. Andrei Faraon From mdickey at snf.stanford.edu Mon Mar 10 08:14:18 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Mar 2008 08:14:18 -0700 Subject: Problem pquest SNF 2008-03-09 22:09:38: low BCl3 flow in pquest Message-ID: Bottle appears empty. Will replace the bottle this morning and put on 24 hour leak check From mtang at snf.stanford.edu Mon Mar 10 09:11:54 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 10 Mar 2008 09:11:54 -0700 Subject: Problem pquest SNF 2008-03-10 09:11:54: BCl3 bottle change underway. No BCl3. Message-ID: Bottle appears empty. Will replace the bottle this morning and put on 24 hour leak check From mdickey at snf.stanford.edu Tue Mar 11 13:29:43 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 11 Mar 2008 13:29:43 -0700 Subject: Comment pquest SNF 2008-03-11 13:29:42: Chamber clean Message-ID: Chamber has been cleaned and an O2 plasma clean done. From mdickey at snf.stanford.edu Tue Mar 11 13:45:20 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 11 Mar 2008 13:45:20 -0700 Subject: Problem pquest SNF 2008-03-10 09:11:54: BCl3 bottle change underway. No BCl3. Message-ID: BCL3 back on line From jimkruger at snf.stanford.edu Fri Mar 14 10:53:08 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 14 Mar 2008 10:53:08 -0700 Subject: Problem pquest SNF 2008-03-14 10:53:07: Loadlock will not pump down Message-ID: I was sure to enable. From mdickey at snf.stanford.edu Fri Mar 14 11:11:58 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 14 Mar 2008 11:11:58 -0700 Subject: Problem pquest SNF 2008-03-14 10:53:07: Loadlock will not pump down Message-ID: Restarted loadlock pump From kaimeifu at snf.stanford.edu Fri Mar 14 14:42:09 2008 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Fri, 14 Mar 2008 14:42:09 -0700 Subject: Problem pquest SNF 2008-03-14 14:42:08: turbo pump shut off Message-ID: a couple minutes into oxygen clean the turbo on the main chamber shut off. From kaimeifu at snf.stanford.edu Fri Mar 14 14:50:07 2008 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: Fri, 14 Mar 2008 14:50:07 -0700 Subject: Problem pquest SNF 2008-03-14 14:50:06: turbopump Message-ID: The system isn't really usable without the pump- but there might be someone out there who knows how to turn it back on and is willing to risk it spontaneously shutting off... the pump turned off 2-3 minutes after plasma ignited (oxygen3 recipe). Suddenly reflective power went way up and I could hear the turbo winding down. From eenriquez at snf.stanford.edu Mon Mar 17 08:34:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 08:34:47 -0700 Subject: Problem pquest SNF 2008-03-14 14:42:08: turbo pump shut off Message-ID: Found the 24 v power supply plug was loose. Secured plug and restarted pumps. Ran O2 plasma for 30 min and placed the users wafer in wafer container. From eenriquez at snf.stanford.edu Mon Mar 17 08:34:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 08:34:56 -0700 Subject: Problem pquest SNF 2008-03-14 14:50:06: turbopump Message-ID: Found the 24 v power supply plug was loose. Secured plug and restarted pumps. Ran O2 plasma for 30 min and placed the users wafer in wafer container. From bashar at snf.stanford.edu Mon Mar 17 20:08:01 2008 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Mon, 17 Mar 2008 20:08:01 -0700 Subject: Problem pquest SNF 2008-03-17 20:08:00: RF Generator Not Communicating Message-ID: If the recipe calls for 65W, the RF Generator does not supply this during the etch. But it can be set to that power mannually this suggests that the software is not properly communicating with the RF Generator Controller unit in the PQuest. From eenriquez at snf.stanford.edu Tue Mar 18 08:42:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Mar 2008 08:42:53 -0700 Subject: Problem pquest SNF 2008-03-17 20:08:00: RF Generator Not Communicating Message-ID: On the RF power supply, I set the "Panel setpoint" and "Panel RF ON" to DISABLE. Ran "Bashirinp" and O2 clean with no problems. From wwang at snf.stanford.edu Thu Mar 27 18:50:36 2008 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Thu, 27 Mar 2008 18:50:36 -0700 Subject: Problem pquest SNF 2008-03-27 18:50:36: Multimeter for end point detection doesn't turn on Message-ID: From mdickey at snf.stanford.edu Fri Mar 28 08:04:01 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Mar 2008 08:04:01 -0700 Subject: Problem pquest SNF 2008-03-27 18:50:36: Multimeter for end point detection doesn't turn on Message-ID: Replaced battery. Leaving off to save on battery life.