Problem pquest SNF 2008-03-09 22:09:38: low BCl3 flow in pquest

faraon at snf.stanford.edu faraon at snf.stanford.edu
Sun Mar 9 22:09:39 PDT 2008


The flow of BCl3 in Pquest was reading 0.5sccm while in the recipe it was set to 10sccm. I suppose that either the BCl3 gas tank ran out of gas or there is a problem with the flow meter.
Andrei Faraon




More information about the pquest-pcs mailing list