Comment pquest SNF 2008-03-11 13:29:42: Chamber clean
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Tue Mar 11 13:29:43 PDT 2008
Previous message:
Problem pquest SNF 2008-03-10 09:11:54: BCl3 bottle change underway. No BCl3.
Next message:
Problem pquest SNF 2008-03-14 10:53:07: Loadlock will not pump down
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Chamber has been cleaned and an O2 plasma clean done.
Previous message:
Problem pquest SNF 2008-03-10 09:11:54: BCl3 bottle change underway. No BCl3.
Next message:
Problem pquest SNF 2008-03-14 10:53:07: Loadlock will not pump down
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the pquest-pcs mailing list