Problem pquest SNF 2008-03-14 14:42:08: turbo pump shut off

eenriquez at eenriquez at
Mon Mar 17 08:34:47 PDT 2008

Found the 24 v power supply plug was loose.  Secured plug and restarted pumps.  Ran O2 plasma for 30 min and placed the users wafer in wafer container.

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