Problem pquest SNF 2008-03-14 14:42:08: turbo pump shut off
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Mar 17 08:34:47 PDT 2008
Found the 24 v power supply plug was loose. Secured plug and restarted pumps. Ran O2 plasma for 30 min and placed the users wafer in wafer container.
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