Problem pquest SNF 2008-03-17 20:08:00: RF Generator Not Communicating

bashar at snf.stanford.edu bashar at snf.stanford.edu
Mon Mar 17 20:08:01 PDT 2008


If the recipe calls for 65W, the RF Generator does not supply this during the etch.  But it can be set to that power mannually this suggests that the software is not properly communicating with the RF Generator Controller unit in the PQuest.




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