Comment pquest SNF 2008-11-03 11:57:34: Completed wet clean

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 3 11:57:35 PST 2008


Ran Oxygen 3 recipe after the wet clean.  Backside He flow is 3.0 sccm and the bias voltage ~ -66 V.




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