Problem pquest SNF 2008-11-04 10:04:43: large variations in DC bias during etching

krivoire at snf.stanford.edu krivoire at snf.stanford.edu
Tue Nov 4 10:04:44 PST 2008


Etching my first sample, DC bias started at -53.2V and finished at -4.4V
For my second sample, DC bias varied back and forth between -32V and -45V. 




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