Problem pquest SNF 2008-11-11 21:57:56: Wafer broken in chamber.

mihuhou at snf.stanford.edu mihuhou at snf.stanford.edu
Tue Nov 11 21:57:56 PST 2008


One piece of the wafer landed on the lower piece of the clamp as can be seen from the peek hole and one piece came out with the arm. Can't see the other pieces.
Sorry for the inconvenience!




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