From eenriquez at snf.stanford.edu Wed Oct 8 15:10:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Oct 2008 15:10:53 -0700 Subject: Comment pquest SNF 2008-10-08 15:10:48: Wet clean completed Message-ID: Completed monthly chamber wet clean. From eenriquez at snf.stanford.edu Wed Oct 15 11:31:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:31:06 -0700 Subject: Comment pquest SNF 2008-10-15 11:31:05: Maintenance activity Message-ID: Installed a new vacuum pump exhaust demister filter. During the system operation check, noticed that the backside He flow (10.9 sccm). We will need to open the chamber and replace the clamping springs. From eenriquez at snf.stanford.edu Wed Oct 15 16:27:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Oct 2008 16:27:06 -0700 Subject: Comment pquest SNF 2008-10-15 11:31:05: Maintenance activity Message-ID: Replaced the worn clamping springs with a set that have the weakest tension. Ran an O2 clean for 45 minutes. Backside He leak rate ~ 4.9 sccm. From bryane at snf.stanford.edu Wed Oct 15 20:24:33 2008 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Wed, 15 Oct 2008 20:24:33 -0700 Subject: Comment pquest SNF 2008-10-15 20:24:32: DC bias low Message-ID: The DC bias voltage was reading -3.4V when normally it reads ~-50V From jimkruger at snf.stanford.edu Thu Oct 16 10:39:07 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 16 Oct 2008 10:39:07 -0700 Subject: Problem pquest SNF 2008-10-16 10:39:07: Found Chip on chuck Message-ID: So poor He, and bias voltage very low. For Bare chuck test, bias V is about normal. From eenriquez at snf.stanford.edu Thu Oct 16 14:34:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 14:34:30 -0700 Subject: Problem pquest SNF 2008-10-16 10:39:07: Found Chip on chuck Message-ID: Removed the chip and wiped down the chuck. Installed a set of medium tension springs. Now backside He flow rate is 2.7 sccm at 10 Torr. The bias voltage (Oxygen recipe) also increased by 20 V. From eenriquez at snf.stanford.edu Thu Oct 16 14:35:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 16 Oct 2008 14:35:32 -0700 Subject: Comment pquest SNF 2008-10-15 20:24:32: DC bias low Message-ID: Installed a set of medium tension springs. Now backside He flow rate is 2.7 sccm at 10 Torr. The bias voltage (Oxygen recipe) also increased by 20 V. From jimkruger at snf.stanford.edu Thu Oct 16 14:38:50 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 16 Oct 2008 14:38:50 -0700 Subject: Comment pquest SNF 2008-10-16 14:38:50: Elmer removed lost chip from chuck Message-ID: He blow-by now 2.7 and bias' back to normal. System in "oxygen" clean until about 1500 From jimkruger at snf.stanford.edu Wed Oct 22 12:31:56 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 22 Oct 2008 12:31:56 -0700 Subject: Shutdown pquest SNF 2008-10-22 12:31:55: broken wafer in system Message-ID: don't know why, faile to watch unload. From eenriquez at snf.stanford.edu Wed Oct 22 16:38:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 16:38:55 -0700 Subject: Shutdown pquest SNF 2008-10-22 12:31:55: broken wafer in system Message-ID: Cleaned the chamber, installed new springs and ran O2 plasma. Cycled wafers several times without a problem. From eenriquez at snf.stanford.edu Wed Oct 22 18:05:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 18:05:57 -0700 Subject: Comment pquest SNF 2008-10-16 14:38:50: Elmer removed lost chip from chuck Message-ID: Archived From jimkruger at snf.stanford.edu Tue Oct 28 11:21:38 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:21:38 -0700 Subject: Shutdown pquest SNF 2008-10-28 11:21:38: broken wafer on chuck Message-ID: springs maybe weaked by heat? From cbaxter at snf.stanford.edu Tue Oct 28 19:18:02 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Oct 2008 19:18:02 -0700 Subject: Shutdown pquest SNF 2008-10-28 11:21:38: broken wafer on chuck Message-ID: Vented chamber and vacuum broken wafer chips. Run 20mins o2 clean. From eenriquez at snf.stanford.edu Wed Oct 29 06:40:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Oct 2008 06:40:56 -0700 Subject: Comment pquest SNF 2008-10-08 15:10:48: Wet clean completed Message-ID: Archived From bryane at snf.stanford.edu Wed Oct 29 18:25:54 2008 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Wed, 29 Oct 2008 18:25:54 -0700 Subject: Comment pquest SNF 2008-10-29 18:25:53: DC Bias Low Message-ID: The DC bias was reading -3.4V during my etch