Problem pquest SNF 2008-10-16 10:39:07: Found Chip on chuck

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 16 14:34:30 PDT 2008


Removed the chip and wiped down the chuck.  Installed a set of medium tension springs.  Now backside He flow rate is 2.7 sccm at 10 Torr.  The bias voltage (Oxygen recipe) also increased by 20 V. 




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