Comment pquest SNF 2008-09-07 21:54:04: Update

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Sep 7 21:54:05 PDT 2008


I removed the throttle valve assembly and cleaned 
the roller bearing and lube with fomblin grease. I cycled
wafer in and out of the chamber on auto mode w/out problem.
I run  modify argon recipe w/40watt rf power the bias power
is -28 bias power.  Still need to run a long o2 clean before
removing system out of shutdown.




More information about the pquest-pcs mailing list