Shutdown pquest SNF 2008-08-29 14:55:35: No bias voltage

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 8 11:24:44 PDT 2008


Disassembled and cleaned out the lower electrode.  Replaced all of the vented screws.  Leak rate - 3 mT/min.  Wet cleaned the chamber.  Ran O3 clean.  Bias = -40V, normal voltage ~ -70V but this is substrate dependant




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