Comment pquest SNF 2008-08-12 13:09:37: trouble striking
shott at snf.stanford.edu
shott at snf.stanford.edu
Thu Sep 11 18:57:53 PDT 2008
We believe that this was caused by shorting between the chuck and the dark shield. Since that has been cleaned, we have not observed problems striking the plasma.
John
More information about the pquest-pcs
mailing list