Problem pquest SNF 2008-09-11 11:25:32: Wafer recovered but He high

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 18 14:54:00 PDT 2008


Found all the clamp support posts were very loose.  Retightened posts and ran O2 clean.  Leak rate now is ~ 0 sccm (2.9).




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