From jimkruger at snf.stanford.edu Wed Apr 1 16:06:17 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 1 Apr 2009 16:06:17 -0700 Subject: Problem pquest SNF 2009-04-01 16:06:16: Pumps off, pressure high Message-ID: During training, I managed to confuse the system with a practice "system reset" so now pressures are high and interlocks prevent system recovery. Elmer is out today. I left a message with John Shott. sorry From jimkruger at snf.stanford.edu Wed Apr 1 16:07:11 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 1 Apr 2009 16:07:11 -0700 Subject: Shutdown pquest SNF 2009-04-01 16:07:11: Pressures high Message-ID: pressure interlocks prevent system restart. From shott at snf.stanford.edu Wed Apr 1 17:01:23 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 1 Apr 2009 17:01:23 -0700 Subject: Problem pquest SNF 2009-04-01 16:06:16: Pumps off, pressure high Message-ID: Reset pump in basement and restarted turbo. System should be OK to use ... John From shott at snf.stanford.edu Wed Apr 1 17:01:33 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 1 Apr 2009 17:01:33 -0700 Subject: Shutdown pquest SNF 2009-04-01 16:07:11: Pressures high Message-ID: Reset pump in basement and restarted turbo. System should be OK to use ... John From jimkruger at snf.stanford.edu Wed Apr 1 18:26:49 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 1 Apr 2009 18:26:49 -0700 Subject: Shutdown pquest SNF 2009-04-01 18:26:49: Foreline pump quit again Message-ID: Turbo errored out. I shut it off From eenriquez at snf.stanford.edu Thu Apr 2 14:17:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Apr 2009 14:17:30 -0700 Subject: Shutdown pquest SNF 2009-04-01 18:26:49: Foreline pump quit again Message-ID: Replaced the foreline pump. Now running the Oxygen recipe. From eenriquez at snf.stanford.edu Thu Apr 2 14:27:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Apr 2009 14:27:35 -0700 Subject: Comment pquest SNF 2009-04-02 14:27:35: Running O2 plasma Message-ID: Cleaning up the system after the chamber vented to atmosphere (foreline pump died). From shott at snf.stanford.edu Thu Apr 2 14:51:05 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 2 Apr 2009 14:51:05 -0700 Subject: Comment pquest SNF 2009-04-02 14:27:35: Running O2 plasma Message-ID: O2 plasma completed ... machine is ready for use. John From eenriquez at snf.stanford.edu Fri Apr 3 12:38:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Apr 2009 12:38:22 -0700 Subject: Comment pquest SNF 2009-03-18 10:05:38: Heater update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 3 13:50:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Apr 2009 13:50:57 -0700 Subject: Comment pquest SNF 2009-04-03 13:50:57: Heater update Message-ID: Have been unable to obtain any usefull information from the vendor (Nexx systems) so far. The only other option right now for replacing the heater is to take the system down for 1 week and disassemble the chuck in order to get the heater dimension and rating information. We can then order the heaters and once they arrive, we will need to take the system down again for another week for the heater replacement. Made another request from the vendor for the heater specifications. If we do not get a response by next week, we need to coordinate when we want to shutdown the system. From arkam at snf.stanford.edu Thu Apr 9 17:30:34 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Thu, 9 Apr 2009 17:30:34 -0700 Subject: Problem pquest SNF 2009-04-09 17:30:33: heater Message-ID: The temperature is not going down below 32.... IS any setting changed? From mtang at snf.stanford.edu Thu Apr 16 16:52:10 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 16 Apr 2009 16:52:10 -0700 Subject: Problem pquest SNF 2009-04-16 16:52:10: No HBr Message-ID: Please be aware that HBr is shutdown at the cabinet. It is unavailable for the machine. From bilee at snf.stanford.edu Fri Apr 17 04:06:05 2009 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Fri, 17 Apr 2009 04:06:05 -0700 Subject: Shutdown pquest SNF 2009-04-17 04:06:05: Wafer broken in the chamber Message-ID: I unloaded the wafer and checked if the etch was completed and I reloaded the same sample right after because the etch was not done. During this second loading, the arm broke the wafer. I am really sorry for the inconvenience. From bilee at snf.stanford.edu Fri Apr 17 04:08:03 2009 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Fri, 17 Apr 2009 04:08:03 -0700 Subject: Comment pquest SNF 2009-04-17 04:08:03: Regarding the broken wafer Message-ID: I did not use top flat wafer but used a prime side flat wafer. From cbaxter at snf.stanford.edu Fri Apr 17 10:11:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 17 Apr 2009 10:11:59 -0700 Subject: Shutdown pquest SNF 2009-04-17 04:06:05: Wafer broken in the chamber Message-ID: Vented chamber and vacuumed wafer chips. Run 10mins o2 plasma. From mtang at snf.stanford.edu Fri Apr 17 16:19:46 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Apr 2009 16:19:46 -0700 Subject: Problem pquest SNF 2009-04-16 16:52:10: No HBr Message-ID: Wups! As Jim Kruger pointed out, although HBr "goes" to the pquest, it isn't actually connected in the tool. From eenriquez at snf.stanford.edu Mon Apr 20 10:38:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Apr 2009 10:38:19 -0700 Subject: Shutdown pquest SNF 2009-04-20 10:38:18: Wet clean Message-ID: From eenriquez at snf.stanford.edu Mon Apr 20 14:23:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Apr 2009 14:23:33 -0700 Subject: Shutdown pquest SNF 2009-04-20 10:38:18: Wet clean Message-ID: Completed wet clean. From eenriquez at snf.stanford.edu Mon Apr 20 14:23:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Apr 2009 14:23:44 -0700 Subject: Comment pquest SNF 2009-03-30 11:18:47: Completed wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Mon Apr 20 14:24:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Apr 2009 14:24:01 -0700 Subject: Comment pquest SNF 2009-04-20 14:24:01: Completed wet clean Message-ID: From jimkruger at snf.stanford.edu Mon Apr 27 15:00:06 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 27 Apr 2009 15:00:06 -0700 Subject: Problem pquest SNF 2009-04-27 15:00:06: Wafer stuck to clamp Message-ID: Hoping for help from John Shott, othwise Elmer in the morning. I will "red light" before leaving it tonight. jimk From jimkruger at snf.stanford.edu Mon Apr 27 15:37:41 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 27 Apr 2009 15:37:41 -0700 Subject: Shutdown pquest SNF 2009-04-27 15:37:41: Wafer stuck to upper clamp Message-ID: From jimkruger at snf.stanford.edu Mon Apr 27 16:11:49 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 27 Apr 2009 16:11:49 -0700 Subject: Shutdown pquest SNF 2009-04-27 16:11:48: Wafer stuck on upper clamp Message-ID: Cesar or Elmer: please check clamp pads, maybe acetone clean resist residues? We have not been encouraging 5 mm resist EBR but maybe we should. jimK From cbaxter at snf.stanford.edu Tue Apr 28 00:40:08 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Apr 2009 00:40:08 -0700 Subject: Shutdown pquest SNF 2009-04-27 15:37:41: Wafer stuck to upper clamp Message-ID: Recovered stuck wafer and run o2 plasma From cbaxter at snf.stanford.edu Tue Apr 28 00:40:12 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Apr 2009 00:40:12 -0700 Subject: Shutdown pquest SNF 2009-04-27 16:11:48: Wafer stuck on upper clamp Message-ID: From cbaxter at snf.stanford.edu Tue Apr 28 00:40:17 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Apr 2009 00:40:17 -0700 Subject: Problem pquest SNF 2009-04-27 15:00:06: Wafer stuck to clamp Message-ID: From jimkruger at snf.stanford.edu Wed Apr 29 09:49:48 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 29 Apr 2009 09:49:48 -0700 Subject: Problem pquest SNF 2009-04-29 09:49:46: Wafer stuck (one pad only this time) on upper clamp Message-ID: From jimkruger at snf.stanford.edu Wed Apr 29 11:44:27 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 29 Apr 2009 11:44:27 -0700 Subject: Shutdown pquest SNF 2009-04-29 11:44:26: wafer in system Message-ID: Had stuck to top clamp, now fallen to chuck. Please save wafer and Acetone clean underside of clanp pads. From mdickey at snf.stanford.edu Wed Apr 29 13:47:36 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Apr 2009 13:47:36 -0700 Subject: Problem pquest SNF 2009-04-29 09:49:46: Wafer stuck (one pad only this time) on upper clamp Message-ID: Retreived wafer. It is at the tool From mdickey at snf.stanford.edu Wed Apr 29 13:48:14 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Apr 2009 13:48:14 -0700 Subject: Shutdown pquest SNF 2009-04-29 11:44:26: wafer in system Message-ID: Recovered wafer. Cleaned the clamp. Running an O2 clean