Shutdown pquest SNF 2009-04-17 04:06:05: Wafer broken in the chamber

bilee at bilee at
Fri Apr 17 04:06:05 PDT 2009

I unloaded the wafer and checked if the etch was completed and I reloaded the same sample right after because the etch was not done. During this second loading, the arm broke the wafer. I am really sorry for the inconvenience. 

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