Problem pquest SNF 2009-04-16 16:52:10: No HBr

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Apr 17 16:19:46 PDT 2009

Previous message: Problem pquest SNF 2009-04-16 16:52:10: No HBr
Next message: Shutdown pquest SNF 2009-04-17 04:06:05: Wafer broken in the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Wups!  As Jim Kruger pointed out, although HBr "goes" to the pquest, it isn't actually connected in the tool.

Previous message: Problem pquest SNF 2009-04-16 16:52:10: No HBr
Next message: Shutdown pquest SNF 2009-04-17 04:06:05: Wafer broken in the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list