Shutdown pquest SNF 2009-04-27 16:11:48: Wafer stuck on upper clamp

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Mon Apr 27 16:11:49 PDT 2009


Cesar or Elmer:  please check clamp pads, maybe acetone clean resist residues?
We have not been encouraging 5 mm resist EBR but maybe we should.
jimK




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