Shutdown pquest SNF 2009-04-27 16:11:48: Wafer stuck on upper clamp
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Apr 28 00:40:12 PDT 2009
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Shutdown pquest SNF 2009-04-27 16:11:48: Wafer stuck on upper clamp
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Problem pquest SNF 2009-04-29 09:49:46: Wafer stuck (one pad only this time) on upper clamp
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Shutdown pquest SNF 2009-04-27 16:11:48: Wafer stuck on upper clamp
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Problem pquest SNF 2009-04-29 09:49:46: Wafer stuck (one pad only this time) on upper clamp
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