From cbaxter at snf.stanford.edu Tue Aug 4 21:36:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Aug 2009 21:36:59 -0700 Subject: Shutdown pquest SNF 2009-07-31 20:27:35: wafer broken inside Message-ID: Mike, vacuum the broken wafer chips. I checked the wafer handoff and run 30mins o2 plasma. From xhlim at snf.stanford.edu Wed Aug 5 12:06:02 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Wed, 5 Aug 2009 12:06:02 -0700 Subject: Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber Message-ID: When unloading, only half the wafer came out on the arm. The other half is still in the chamber. Backside Helium flow during run is about 6.5 to 7 sccm. From xhlim at snf.stanford.edu Wed Aug 5 12:20:44 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Wed, 5 Aug 2009 12:20:44 -0700 Subject: Shutdown pquest SNF 2009-08-05 12:20:44: Wafer broke in unloading process Message-ID: Small piece still left inside chamber on the stage. Jim Kruger advised shutting down. From jimkruger at snf.stanford.edu Wed Aug 5 18:30:33 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 5 Aug 2009 18:30:33 -0700 Subject: Problem pquest SNF 2009-08-05 18:30:33: Wafer lost in system- fell off rear pin on Unload Message-ID: Not broken, I caught it in time. Dummy std. wafer slipped off rear pin during unload. From eenriquez at snf.stanford.edu Thu Aug 6 14:55:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:55:16 -0700 Subject: Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber Message-ID: Cleaned the chamber and secured the lift pin holder to the lift assembly. Cycled loading several times with no problems. Backside He flow is about 5.4 sccm. From eenriquez at snf.stanford.edu Thu Aug 6 14:55:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:55:21 -0700 Subject: Shutdown pquest SNF 2009-08-05 12:20:44: Wafer broke in unloading process Message-ID: Cleaned the chamber and secured the lift pin holder to the lift assembly. Cycled loading several times with no problems. Backside He flow is about 5.4 sccm. From eenriquez at snf.stanford.edu Thu Aug 6 14:55:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:55:26 -0700 Subject: Problem pquest SNF 2009-08-05 18:30:33: Wafer lost in system- fell off rear pin on Unload Message-ID: Cleaned the chamber and secured the lift pin holder to the lift assembly. Cycled loading several times with no problems. Backside He flow is about 5.4 sccm. From eenriquez at snf.stanford.edu Thu Aug 6 14:57:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:57:27 -0700 Subject: Problem pquest SNF 2009-08-06 14:57:27: High backside He flow Message-ID: Backside He cooling flow rate with a wafer is 5.5 sccm, without = 8.6 sccm. From cbaxter at snf.stanford.edu Thu Aug 6 18:52:45 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 6 Aug 2009 18:52:45 -0700 Subject: Problem pquest SNF 2009-08-06 14:57:27: High backside He flow Message-ID: Changed lip seal o-ring and loaded wafer on manual mode, with wafer b/s he leak is 3.1sccm From eenriquez at snf.stanford.edu Fri Aug 7 08:52:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Aug 2009 08:52:48 -0700 Subject: Shutdown pquest SNF 2009-08-07 08:52:47: Broken wafer Message-ID: Wafer broke during handling test. From eenriquez at snf.stanford.edu Fri Aug 7 15:15:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Aug 2009 15:15:47 -0700 Subject: Shutdown pquest SNF 2009-08-07 08:52:47: Broken wafer Message-ID: Cleaned the chamber. Found 3 of the clamp posts were much lower than the 4th. Added wafers to level the clamp and adjusted the clamp down position. Backside He flow @ 10 Torr is still around 5 sccm. From eenriquez at snf.stanford.edu Fri Aug 7 15:16:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Aug 2009 15:16:11 -0700 Subject: Problem pquest SNF 2009-08-07 15:16:10: High backside He flow Message-ID: From jimkruger at snf.stanford.edu Fri Aug 7 18:03:17 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 7 Aug 2009 18:03:17 -0700 Subject: Problem pquest SNF 2009-08-07 18:03:17: RF interference with heater worse Message-ID: After my "hot" run (gas cooled, set 190 C, get 180 C), RF = 200 watts, V = 79.9 volts: The heater shows "Err 06" as soon as RF comes on for "Oxygen3", I have not tested other recipes. From jimkruger at snf.stanford.edu Fri Aug 7 18:07:01 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 7 Aug 2009 18:07:01 -0700 Subject: Comment pquest SNF 2009-08-07 18:07:00: He blowby a little improved Message-ID: Getting about 3.5 sccm for std wafers after "leveling" clamp support with washers. Use caution on disassembly to avoid dropping washers. From krivoire at snf.stanford.edu Sat Aug 8 08:48:27 2009 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Sat, 8 Aug 2009 08:48:27 -0700 Subject: Problem pquest SNF 2009-08-08 08:48:26: err6 on heater panel Message-ID: heater panel displays err6 and temperature reads 60 despite being set for 10. From jimkruger at yahoo.com Sat Aug 8 09:27:52 2009 From: jimkruger at yahoo.com (jim kruger) Date: Sat, 8 Aug 2009 09:27:52 -0700 (PDT) Subject: Problem pquest SNF 2009-08-08 08:48:26: err6 on heater panel In-Reply-To: <20090808154827.BAB391904AA@smtp5.stanford.edu> Message-ID: <716877.88686.qm@web38907.mail.mud.yahoo.com> I saw this last night. You can reset the heater controller by holding in both "arrows" for a count of 10, then cycling through "Menu" until it is reading "temperature" again. I am not sure, but if you set the controller for "0 C", then watch the "L1" (heating) indicator to make sure it stays off, you can set the chiller for a few degrees below desired chuck temperature as we did before. As soon as the RF comes on, the Err6 reappears, but if the "L1" indicator stays off, I believe the chuck will stay at the chiller temperature. Voltage vs. RF power is still low, I increased RF power but still did not get as much voltage as expected. My process worked, but it is not very sensitive to voltage. I would not commit any really important sample. jim --- On Sat, 8/8/09, krivoire at snf.stanford.edu wrote: > From: krivoire at snf.stanford.edu > Subject: Problem pquest SNF 2009-08-08 08:48:26: err6 on heater panel > To: pquest-pcs at snf.stanford.edu > Date: Saturday, August 8, 2009, 8:48 AM > heater panel displays err6 and > temperature reads 60 despite being set for 10. > > From carterlin at snf.stanford.edu Sun Aug 9 18:08:11 2009 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sun, 9 Aug 2009 18:08:11 -0700 Subject: Problem pquest SNF 2009-08-09 18:08:11: Message-ID: From carterlin at snf.stanford.edu Sun Aug 9 18:11:49 2009 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sun, 9 Aug 2009 18:11:49 -0700 Subject: Problem pquest SNF 2009-08-09 18:11:49: chuck temperature too high Message-ID: temperature reaches 62C and backflow He 7.2 when RF strikes, despite the chiller set to 1C. chuck controller displays err6 when temperature reaches too high From cbaxter at snf.stanford.edu Sun Aug 9 19:50:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 9 Aug 2009 19:50:59 -0700 Subject: Comment pquest SNF 2009-08-09 19:50:58: Heater readout problem. Message-ID: Will continue to troubleshoot heater readout problem tomorrow. From shott at snf.stanford.edu Tue Aug 11 08:15:47 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 11 Aug 2009 08:15:47 -0700 Subject: Shutdown pquest SNF 2009-08-11 08:15:47: Troubleshooting TC readout problems ... Message-ID: We are shutting down temporarily to debug the TC readout problems. From eenriquez at snf.stanford.edu Mon Aug 17 14:50:42 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Aug 2009 14:50:42 -0700 Subject: Comment pquest SNF 2009-06-18 10:19:03: Update rf out Message-ID: archived From eenriquez at snf.stanford.edu Mon Aug 17 14:50:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Aug 2009 14:50:53 -0700 Subject: Comment pquest SNF 2009-06-24 08:08:28: RF reliability check Message-ID: archived From eenriquez at snf.stanford.edu Mon Aug 17 15:06:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Aug 2009 15:06:40 -0700 Subject: Comment pquest SNF 2009-08-17 15:06:40: Update heater Message-ID: The TC junction seems like it has been dislodged from its insulating ceramic bead. When I lightly pulled or pushed the tc wire (from within the RF junction box), I can vary the resistance between the electrode and the tc wire from a few ohms to 10's of meg ohms. Need to disassemble the electrode and secure the tc From eenriquez at snf.stanford.edu Tue Aug 18 07:39:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Aug 2009 07:39:15 -0700 Subject: Comment pquest SNF 2009-08-09 19:50:58: Heater readout problem. Message-ID: Archived From eenriquez at snf.stanford.edu Tue Aug 18 07:39:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Aug 2009 07:39:30 -0700 Subject: Problem pquest SNF 2009-08-09 18:08:11: Message-ID: From eenriquez at snf.stanford.edu Wed Aug 19 19:21:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Aug 2009 19:21:18 -0700 Subject: Comment pquest SNF 2009-08-19 19:21:17: Update Message-ID: Repaired the shorted TC and installed. Need to finishish reassembling the chamber. From eenriquez at snf.stanford.edu Fri Aug 21 15:29:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Aug 2009 15:29:07 -0700 Subject: Comment pquest SNF 2009-08-17 15:06:40: Update heater Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 21 15:29:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Aug 2009 15:29:16 -0700 Subject: Comment pquest SNF 2009-08-19 19:21:17: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 21 15:39:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Aug 2009 15:39:16 -0700 Subject: Comment pquest SNF 2009-08-21 15:39:16: Update heater Message-ID: Completed chamber reassembly. Ran O2 plasma for 10 minutes with the heater set at 45 C. The temp reading was stable even when the plasma was on. Loaded and unloaded wafers with no problem. The He cooling flow however was around 5.6 sccm. Need to adjust the wafer clamp to improve the He leak-by. Also need to re-install all the RF enclosure cover screws From cbaxter at snf.stanford.edu Sun Aug 23 13:34:04 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 13:34:04 -0700 Subject: Comment pquest SNF 2009-08-23 13:34:03: Backside he leak Message-ID: Installled cover's for rf enclosure and ac heater box.. Adjusted he clamp, but the lowest backside he I can get is 4.9sccm it won't go any lower. I cleaned the clamp and also changed he o-ring the same result b/s he is 4.9 to 5.6. Need to continue trouble shooting. From cbaxter at snf.stanford.edu Sun Aug 23 13:35:03 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 13:35:03 -0700 Subject: Comment pquest SNF 2009-08-23 13:35:02: There is a wafer in the chamber. Message-ID: From eenriquez at snf.stanford.edu Mon Aug 24 15:36:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Aug 2009 15:36:18 -0700 Subject: Comment pquest SNF 2009-08-24 15:36:18: Update Message-ID: Backside He cooling is OK now after adjusting the clamp anti-tilt mechanism (wedge). Helium flow rate was about 3.2 sccm ( slowly drifted to about 1.6 sccm 3 minutes into the process. Heater is OK. RF is not OK. Ran Oxygen recipe with no problems but when Jim K ran the Oxygen3 recipe (100 W), the bias dropped to -3 V. Opened the chamber; found the electrode is shorted to ground. From eenriquez at snf.stanford.edu Tue Aug 25 15:24:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Aug 2009 15:24:15 -0700 Subject: Comment pquest SNF 2009-08-25 15:24:14: Update Message-ID: Shorted between the dark space shield and the electrode. Unable to align the 4-pieces shield without shorting. From eenriquez at snf.stanford.edu Wed Aug 26 18:24:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:24:17 -0700 Subject: Shutdown pquest SNF 2009-08-11 08:15:47: Troubleshooting TC readout problems ... Message-ID: Repaired the electrode tc. Aligned dark space shield. Ran oxygen3 for 900 sec. Backside He flow rate is about 5.6 sccm. From eenriquez at snf.stanford.edu Wed Aug 26 18:24:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:24:26 -0700 Subject: Comment pquest SNF 2009-08-25 15:24:14: Update Message-ID: Archive From eenriquez at snf.stanford.edu Wed Aug 26 18:24:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:24:33 -0700 Subject: Comment pquest SNF 2009-08-24 15:36:18: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Aug 26 18:24:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:24:39 -0700 Subject: Comment pquest SNF 2009-08-23 13:35:02: There is a wafer in the chamber. Message-ID: Archived From eenriquez at snf.stanford.edu Wed Aug 26 18:24:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:24:45 -0700 Subject: Comment pquest SNF 2009-08-23 13:34:03: Backside he leak Message-ID: Archived From eenriquez at snf.stanford.edu Wed Aug 26 18:24:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:24:52 -0700 Subject: Comment pquest SNF 2009-08-21 15:39:16: Update heater Message-ID: Archived From eenriquez at snf.stanford.edu Wed Aug 26 18:25:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:25:05 -0700 Subject: Problem pquest SNF 2009-08-09 18:11:49: chuck temperature too high Message-ID: Repaired the tc From eenriquez at snf.stanford.edu Wed Aug 26 18:25:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:25:15 -0700 Subject: Problem pquest SNF 2009-08-08 08:48:26: err6 on heater panel Message-ID: Repaired the tc From eenriquez at snf.stanford.edu Wed Aug 26 18:25:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:25:30 -0700 Subject: Problem pquest SNF 2009-08-07 18:03:17: RF interference with heater worse Message-ID: Repaired the tc From eenriquez at snf.stanford.edu Wed Aug 26 18:28:08 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:28:08 -0700 Subject: Comment pquest SNF 2009-07-19 07:14:04: After manually adjusting works again Message-ID: From eenriquez at snf.stanford.edu Wed Aug 26 18:28:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:28:11 -0700 Subject: Comment pquest SNF 2009-07-19 07:14:33: After manual adjusting works again Message-ID: From dlee76 at snf.stanford.edu Thu Aug 27 09:15:59 2009 From: dlee76 at snf.stanford.edu (dlee76 at snf.stanford.edu) Date: Thu, 27 Aug 2009 09:15:59 -0700 Subject: Problem pquest SNF 2009-08-27 09:15:59: Wafer was broken in the chamber Message-ID: During the test process and oxygen 3 process, my wafer seems to be broken and I could not unload my wafer from main chamber. From dlee76 at snf.stanford.edu Thu Aug 27 09:16:35 2009 From: dlee76 at snf.stanford.edu (dlee76 at snf.stanford.edu) Date: Thu, 27 Aug 2009 09:16:35 -0700 Subject: Shutdown pquest SNF 2009-08-27 09:16:35: wafer was broken Message-ID: During the test process and oxygen 3 process, my wafer seems to be broken and I could not unload my wafer from main chamber. From eenriquez at snf.stanford.edu Thu Aug 27 11:16:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Aug 2009 11:16:59 -0700 Subject: Problem pquest SNF 2009-08-27 09:15:59: Wafer was broken in the chamber Message-ID: Removed the broken wafer. Adjusted the clamp level. Ran O2 plasma. Backside He cooling flow is now around 3 sccm. From eenriquez at snf.stanford.edu Thu Aug 27 11:17:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Aug 2009 11:17:06 -0700 Subject: Shutdown pquest SNF 2009-08-27 09:16:35: wafer was broken Message-ID: Removed the broken wafer. Adjusted the clamp level. Ran O2 plasma. Backside He cooling flow is now around 3 sccm. From eenriquez at snf.stanford.edu Thu Aug 27 11:18:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Aug 2009 11:18:04 -0700 Subject: Problem pquest SNF 2009-08-07 15:16:10: High backside He flow Message-ID: Leveled the clamp. Now He flow ~ 3 sccm From eenriquez at snf.stanford.edu Thu Aug 27 11:18:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Aug 2009 11:18:10 -0700 Subject: Comment pquest SNF 2009-08-07 18:07:00: He blowby a little improved Message-ID: Archived From shott at snf.stanford.edu Fri Aug 28 11:34:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 28 Aug 2009 11:34:42 -0700 Subject: Comment pquest SNF 2009-08-28 11:34:41: Ready7 for Jim Kruger usage .... Message-ID: pquest has been restarted. I began to run oxygen3 (well, didn't get it started) when I found that Jim Kruger's wafer is in the chamber. As a result, I didn't fire the plasma but believe that everything else is functional and am releasing the tool for Jim Kruger's usage. I'm goijng to reserve the tool in his name so that nobody disturbs his loaded wafer. Thanks, John From jimkruger at yahoo.com Fri Aug 28 11:49:37 2009 From: jimkruger at yahoo.com (jim kruger) Date: Fri, 28 Aug 2009 11:49:37 -0700 (PDT) Subject: Comment pquest SNF 2009-08-28 11:34:41: Ready7 for Jim Kruger usage .... In-Reply-To: <20090828183442.E430F1A0429@smtp3.stanford.edu> Message-ID: <765205.71892.qm@web38902.mail.mud.yahoo.com> Thanks for your caution and consideration. The wafer is just a test wafer so not of special value. I will check PQuest as soon as the Lab opens. jim --- On Fri, 8/28/09, shott at snf.stanford.edu wrote: > From: shott at snf.stanford.edu > Subject: Comment pquest SNF 2009-08-28 11:34:41: Ready7 for Jim Kruger usage .... > To: pquest-pcs at snf.stanford.edu > Date: Friday, August 28, 2009, 11:34 AM > pquest has been restarted.? I > began to run oxygen3 (well, didn't get it started) when I > found that Jim Kruger's wafer is in the chamber.? As a > result, I didn't fire the plasma but believe that everything > else is functional and am releasing the tool for Jim > Kruger's usage. > I'm goijng to reserve the tool in his name so that nobody > disturbs his loaded wafer. > Thanks, > John > > From carterlin at snf.stanford.edu Sat Aug 29 15:07:48 2009 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sat, 29 Aug 2009 15:07:48 -0700 Subject: Problem pquest SNF 2009-08-29 15:07:48: wafer not positioned in holder Message-ID: wafers were not unloaded in the holer during unload. They were put closer to the head of the arm, away from the flat edges with a gap of about 1cm. Checked unload process from the side windows with flashlight. Looked fine. Maybe the loading arm didn't reach far enough, but couldn't tell. From leoyu at snf.stanford.edu Sat Aug 29 16:55:59 2009 From: leoyu at snf.stanford.edu (leoyu at snf.stanford.edu) Date: Sat, 29 Aug 2009 16:55:59 -0700 Subject: Problem pquest SNF 2009-08-29 16:55:59: DC bias only half of its previous value Message-ID: DC bias differs from previous value (a month ago) quite a lot. From jimkruger at snf.stanford.edu Sun Aug 30 13:02:49 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 30 Aug 2009 13:02:49 -0700 Subject: Shutdown pquest SNF 2009-08-30 13:02:48: RF tuner failure Message-ID: System worked for a few minutes on "Oxygen3", then RF Tuning went to negative "fail" on both channels. No response on trying to re-center in manual, even with RF Power supply off. Maybe + power supply for Tuner went out? From eenriquez at snf.stanford.edu Mon Aug 31 14:51:00 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Aug 2009 14:51:00 -0700 Subject: Comment pquest SNF 2009-08-31 14:50:59: Defective matching network controller Message-ID: Ordered a new controller. Will update on its ETA.