Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber

xhlim at snf.stanford.edu xhlim at snf.stanford.edu
Wed Aug 5 12:06:02 PDT 2009


When unloading, only half the wafer came out on the arm. The other half is still in the chamber.
Backside Helium flow during run is about 6.5 to 7 sccm.  




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