Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 6 14:55:16 PDT 2009

Previous message: Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber
Next message: Shutdown pquest SNF 2009-08-05 12:20:44: Wafer broke in unloading process
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Cleaned the chamber and secured the lift pin holder to the lift assembly.  Cycled loading several times with no problems.  Backside He flow is about 5.4 sccm.

Previous message: Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber
Next message: Shutdown pquest SNF 2009-08-05 12:20:44: Wafer broke in unloading process
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list