Problem pquest SNF 2009-08-05 12:06:02: Wafer broke in chamber

eenriquez at eenriquez at
Thu Aug 6 14:55:16 PDT 2009

Cleaned the chamber and secured the lift pin holder to the lift assembly.  Cycled loading several times with no problems.  Backside He flow is about 5.4 sccm.

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