Shutdown pquest SNF 2009-08-05 12:20:44: Wafer broke in unloading process

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 6 14:55:21 PDT 2009


Cleaned the chamber and secured the lift pin holder to the lift assembly.  Cycled loading several times with no problems.  Backside He flow is about 5.4 sccm.




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