Problem pquest SNF 2009-08-06 14:57:27: High backside He flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 6 14:57:27 PDT 2009


Backside He cooling flow rate with a wafer is 5.5 sccm, without = 8.6 sccm.




More information about the pquest-pcs mailing list