Problem pquest SNF 2009-08-06 14:57:27: High backside He flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 6 14:57:27 PDT 2009

Previous message: Problem pquest SNF 2009-08-05 18:30:33: Wafer lost in system- fell off rear pin on Unload
Next message: Problem pquest SNF 2009-08-06 14:57:27: High backside He flow
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Backside He cooling flow rate with a wafer is 5.5 sccm, without = 8.6 sccm.

Previous message: Problem pquest SNF 2009-08-05 18:30:33: Wafer lost in system- fell off rear pin on Unload
Next message: Problem pquest SNF 2009-08-06 14:57:27: High backside He flow
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list