Problem pquest SNF 2009-08-06 14:57:27: High backside He flow

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Aug 6 18:52:45 PDT 2009


Changed lip seal o-ring  and loaded wafer on manual mode,
with wafer b/s he leak is 3.1sccm




More information about the pquest-pcs mailing list