Shutdown pquest SNF 2009-08-07 08:52:47: Broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Aug 7 15:15:47 PDT 2009


Cleaned the chamber.  Found 3 of the clamp posts were much lower than the 4th.  Added wafers to level the clamp and adjusted the clamp down position.  Backside He flow @ 10 Torr is still around 5 sccm.




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